［Application］
A vacuum system dedicated to the grid seal type vacuum chucks.
［Features］
●The vacuum tank has been eliminated to make a very compact size compared with the conventional model
(VPU-E10). This system can be handled easily.
●A function to check the vacuum status is incorporated.
●This is for dry operation.
●Auxiliary functions in consideration of operating status and safety are incorporated. (Vacuum adjustment,
interlock with the machine via vacuum check output signals, etc.)
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